OXIDATION MECHANISMS IN WSI2 THIN-FILMS

[1] BAGLIN JEE, UNPUBLISHED

[2] HIGH-TEMPERATURE OXIDATION .2. MOLYBDENUM SILICIDES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (06) : 583 - &

[3] CROWDER BL, 1977, FAL M EL SOC ATL

[4] KUMAR V, 1972, J ELECTROCHEM SOC, V123, P262

[5] REACTION-KINETICS OF TUNGSTEN THIN-FILMS ON SILICON (100) SURFACES [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (10) : 4366 - 4369

[6] MOCHIZUKI T, 1977, FAL EL SOC M ATL, P331

[7] TU KN, 1978, THIN FILMS INTERFACE

[8] HIGH-TEMPERATURE OXIDATION OF MOLYBDENUM DISILICIDE [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (04) : 173 - &

[9] ZIRINSKY S, 1977, FAL M EL SOC ATL

[10] 1953, NBS539 CIRC, V1, P29

[1] BAGLIN JEE, UNPUBLISHED

[2] HIGH-TEMPERATURE OXIDATION .2. MOLYBDENUM SILICIDES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (06) : 583 - &

[3] CROWDER BL, 1977, FAL M EL SOC ATL

[4] KUMAR V, 1972, J ELECTROCHEM SOC, V123, P262

[5] REACTION-KINETICS OF TUNGSTEN THIN-FILMS ON SILICON (100) SURFACES [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (10) : 4366 - 4369

[6] MOCHIZUKI T, 1977, FAL EL SOC M ATL, P331

[7] TU KN, 1978, THIN FILMS INTERFACE

[8] HIGH-TEMPERATURE OXIDATION OF MOLYBDENUM DISILICIDE [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (04) : 173 - &

[9] ZIRINSKY S, 1977, FAL M EL SOC ATL

[10] 1953, NBS539 CIRC, V1, P29