DAMAGE TO SILICON PRODUCED BY BOMBARDMENT WITH HELIUM IONS

被引：43

作者：

GIANOLA, UF

机构：

来源：

关键词：

D O I：

10.1063/1.1722877

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：868 / 873

页数：6

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