INFLUENCE OF BACKSCATTERED ELECTRONS ON RESOLUTION OF TRANSMISSION SECONDARY-ELECTRON EMITTERS

被引：8

作者：

KLEIN, W

HARDER, M

POLLEHN, H

机构：

来源：

APPLIED OPTICS | 1972年 / 11卷 / 10期

关键词：

D O I：

10.1364/AO.11.002337

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2337 / +

页数：1

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