THE PHOTOLUMINESCENCE SPECTRA OF POROUS SILICON BOILED IN WATER

被引：24

作者：

LI, KH

TSAI, C

SHIH, S

HSU, T

KWONG, DL

CAMPBELL, JC

机构：

[1] Microelectronics Research Center, Department of Electrical and Computer Engineering, University of Texas at Austin, Austin

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 08期

关键词：

D O I：

10.1063/1.352280

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The photoluminescence (PL) of porous Si that has been hydrogenated in boiling water has been investigated. The PL intensity is observed to increase with a concurrent shift of the spectral peak to shorter wavelengths. These effects can be explained in terms of size effects in the microstructures of porous Si. The spectral changes after annealing and after rehydrogenation are similar to the behavior of a-Si:H. We conclude that hydrogen plays an important role in the luminescence of porous Si.

引用

页码：3816 / 3817

页数：2

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