STRUCTURAL CONTROL OF EVAPORATED LEAD-PHTHALOCYANINE FILMS

被引:45
作者
MIYAMOTO, A
NICHOGI, K
TAOMOTO, A
NAMBU, T
MURAKAMI, M
机构
[1] Matsushita Research Institute Tokyo, Inc., Tama-Ku, Kawasaki, 214
关键词
ANNEALING; EVAPORATION; HEAT TREATMENT; X-RAY DIFFRACTION;
D O I
10.1016/0040-6090(94)06300-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Monoclinic lead-phthalocyanine crystal film having only (320) orientation and monoclinic crystal film composed of lower (200)- and upper (320)-rich orientation were obtained at a substrate temperature of 293 K, and deposition rates higher than 1.0 nm s(-1) and from 0.8 to 0.2 nm s(-1), respectively. A film consisting of mixed triclinic and monoclinic crystals in which the distribution was almost homogeneous was obtained at a substrate temperature of 293 K and a deposition rate of 0.1 nm s(-1), and a pure triclinic crystal film was obtained at a substrate temperature of 373 K.
引用
收藏
页码:64 / 67
页数:4
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