PREPARATION AND PROPERTIES OF HIGH-QUALITY A-SI FILMS WITH A SUPER CHAMBER (SEPARATED ULTRAHIGH-VACUUM REACTION CHAMBER)

被引：54

作者：

TSUDA, S

TAKAHAMA, T

ISOMURA, M

TARUI, H

NAKASHIMA, Y

HISHIKAWA, Y

NAKAMURA, N

MATSUOKA, T

NISHIWAKI, H

NAKANO, S

OHNISHI, M

KUWANO, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 01期

关键词：

D O I：

10.1143/JJAP.26.33

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：33 / 38

页数：6

共 8 条

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[3] PREPARATION AND PROPERTIES OF AMORPHOUS-SILICON PRODUCED BY A CONSECUTIVE, SEPARATED REACTION CHAMBER METHOD [J].

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[8] PREVENTION OF THE LIGHT-INDUCED EFFECT OF A-SI-H FILMS AND SOLAR-CELLS [J].

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