REX - A LEAST-SQUARES FITTING PROGRAM FOR THE SIMULATION AND ANALYSIS OF X-RAY REFLECTIVITY DATA

被引：9

作者：

CRABB, TA

GIBSON, PN

ROBERTS, KJ

机构：

[1] INST ADV MAT,JOINT RES CTR,BLDG 44,I-21020 ISPRA,ITALY

[2] UNIV STRATHCLYDE,DEPT PURE & APPL CHEM,GLASGOW G1 1XL,SCOTLAND

[3] SERC,DARESBURY LAB,WARRINGTON WA4 4AD,CHESHIRE,ENGLAND

来源：

COMPUTER PHYSICS COMMUNICATIONS | 1993年 / 77卷 / 03期

关键词：

X-RAY REFLECTIVITY; ROUGHNESS; THICKNESS; THIN FILMS; ANOMALOUS DISPERSION; MULTIPLE PATTERN FITTING;

D O I：

10.1016/0010-4655(93)90188-I

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

A FORTRAN program REX, which has been developed to facilitate the interpretation of X-ray reflectivity data, is described. The program allows the simulation of reflectivity profiles as a function of either incident angle or of energy. Factors such as anomalous dispersion, and surface and interface roughness are taken into account in the model. In addition, experimental data of reflectivity as a function of incident angle can be matched to user-supplied theoretical parameters by a least-squares refinement procedure. Experimental reflectivity data recorded at several X-ray wavelengths can be analysed simultaneously, thus eliminating certain experimental errors and increasing the probability of finding the correct physical model when fitting the data.

引用

页码：441 / 449

页数：9

共 10 条

[1]

Beckmann P., 1963, SCATTERING ELECTROMA

[2] X-RAY-SCATTERING STUDIES OF THIN-FILMS AND SURFACES - THERMAL OXIDES ON SILICON [J].