THEORY OF THE RF SHEATH IN THE REGIME BETWEEN THE ION AND ELECTRON-PLASMA FREQUENCIES

被引：30

作者：

BIEHLER, S

机构：

来源：

关键词：

D O I：

10.1063/1.100997

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：317 / 319

页数：3

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