FILM-INDUCED STRESS MODEL

[1] CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) : 534 - 535

[2] Chopra K.L, 1969, THIN FILM PHENOMENA

[3] HEARN EW, 1977, ADV XRAY ANAL, V20, P273

[4] HOFFMAN RW, 1973, PHYSICS THIN FILMS, V3

[5] LEROY B, 1983, THESIS U PARIS PARIS

[6] MAISSEL LI, 1973, INTRO THIN FILMS

[1] CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) : 534 - 535

[2] Chopra K.L, 1969, THIN FILM PHENOMENA

[3] HEARN EW, 1977, ADV XRAY ANAL, V20, P273

[4] HOFFMAN RW, 1973, PHYSICS THIN FILMS, V3

[5] LEROY B, 1983, THESIS U PARIS PARIS

[6] MAISSEL LI, 1973, INTRO THIN FILMS