CHARACTERIZATION AND OPTIMIZATION OF A RADIOFREQUENCY GLOW-DISCHARGE ION-SOURCE FOR A HIGH-RESOLUTION MASS-SPECTROMETER

被引:32
作者
SAPRYKIN, AI [1 ]
BECKER, JS [1 ]
DIETZE, HJ [1 ]
机构
[1] RES CTR JUELICH,CENT DEPT CHEM ANAL,D-52425 JULICH,GERMANY
关键词
RADIOFREQUENCY GLOW DISCHARGE; ION SOURCE; MASS SPECTROMETRY; ENERGY DISTRIBUTION;
D O I
10.1039/ja9951000897
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A radiofrequency (rf) powered glow discharge ion source has been designed and coupled to a double-focusing mass spectrometer. An electrical interface has been developed to provide an effective rf power transfer, thereby ensuring rf shielding and grounding, and to couple the ion source to the accelerating potential. The device permits the direct analysis of almost any solid sample type (conducting, semiconducting and non-conducting). In order to establish optimum conditions for the trace analysis of solids, mass spectrometric studies of the dependence of ion signal intensities in an rf glow discharge on operating parameters (applied rf power and discharge gas pressure) were carried our. The energy distribution of the ion species was measured by the accelerating voltage scan. It was shown that the singly charged atomic ions of the sample have about a 10 eV higher average energy than the discharge and residual gas ions. An effective energy separation of the analyte ions from the discharge and residual gas ions was achieved by setting the position and width of the energy window of the double-focusing mass spectrometer. The optimization of the operating parameters of a glow discharge ion source and correct adjustment of the ion transfer optics of a mass analyser permit an improvement in the analytical characteristics of the elaborated device.
引用
收藏
页码:897 / 901
页数:5
相关论文
共 18 条
[1]   MASS-SPECTROMETRIC STUDIES OF POSITIVE-IONS IN RF GLOW-DISCHARGES [J].
COBURN, JW .
THIN SOLID FILMS, 1989, 171 (01) :65-80
[2]   DESIGN AND CHARACTERIZATION OF A RADIO-FREQUENCY-POWERED GLOW-DISCHARGE SOURCE FOR DOUBLE-FOCUSING MASS SPECTROMETERS [J].
DUCKWORTH, DC ;
DONOHUE, DL ;
SMITH, DH ;
LEWIS, TA ;
MARCUS, RK .
ANALYTICAL CHEMISTRY, 1993, 65 (18) :2478-2484
[3]   DIRECT INSERTION PROBE FOR RADIOFREQUENCY POWERED GLOW-DISCHARGE MASS-SPECTROMETRY [J].
DUCKWORTH, DC ;
MARCUS, RK .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1992, 7 (04) :711-715
[4]  
GREENE WM, 1988, J APPL PHYS, V72, P4566
[5]   QUANTITATIVE DEPTH PROFILE AND BULK ANALYSIS WITH HIGH DYNAMIC-RANGE BY ELECTRON-GAS SPUTTERED NEUTRAL MASS-SPECTROMETRY [J].
JEDE, R ;
PETERS, H ;
DUNNEBIER, G ;
GANSCHOW, O ;
KAISER, U ;
SEIFERT, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2271-2279
[6]  
KOHLER K, 1985, J APPL PHYS, V57, P59, DOI 10.1063/1.335396
[7]  
KOHLER K, 1985, J APPL PHYS, V58, P3350, DOI 10.1063/1.335797
[8]   ELECTRICAL AND OPTICAL CHARACTERISTICS OF A RADIO-FREQUENCY GLOW-DISCHARGE ATOMIC-EMISSION SOURCE WITH DIELECTRIC SAMPLE ATOMIZATION [J].
LAZIK, C ;
MARCUS, RK .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1993, 48 (14) :1673-1689
[9]   RADIOFREQUENCY POWERED GLOW-DISCHARGES FOR EMISSION AND MASS-SPECTROMETRY - OPERATING CHARACTERISTICS, FIGURES OF MERIT AND FUTURE-PROSPECTS [J].
MARCUS, RK .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1994, 9 (09) :1029-1037