A 400 KEV ION ACCELERATOR FOR SURFACE STUDY

被引：5

作者：

UCHIYAMA, T ^{[1
]}

TAKAGI, K ^{[1
]}

KATAGAWA, T ^{[1
]}

MIHARA, Y ^{[1
]}

FUKUI, R ^{[1
]}

TSUKAKOSHI, O ^{[1
]}

KIKUCHI, R ^{[1
]}

ISOYA, A ^{[1
]}

KOMIYA, S ^{[1
]}

KOSHIKAWA, T ^{[1
]}

SUZUKI, T ^{[1
]}

机构：

[1] OSAKA ELECTROCOMMUN UNIV,NEYAGAWA,OSAKA 572,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期

关键词：

D O I：

10.1016/0168-583X(87)90846-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：306 / 309

页数：4

共 7 条

[1] 1 MV ROTATING-DISK TYPE HIGH-VOLTAGE GENERATOR FOR APPLICATION TO AN IMPLANTER [J].

ISOYA, A ;

MIYAKE, Y ;

TAKAGI, K ;

UCHIYAMA, T ;

YUI, K ;

KIKUCHI, R ;

KOMIYA, S ;

HAYASHI, C .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :250-257

[2] ROTATING-DISK TYPE HIGH-VOLTAGE GENERATOR [J].

ISOYA, A ;

KOBAYASHI, K ;

NAKASHIMA, T ;

MAEDA, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1985, 236 (02) :215-221

[3]

ISOYA A, 1980, 3RD P S ACC SCI TECH, P251

[4]

KATAGAWA T, 1986, 10TH P S ISIAT 86, P311

[5]

KIKUCHI R, 1985, 5TH INT C ION PLASM, P120

[6]

SARIS FW, 1981, 9TH P C AT COLL SOL, P625

[7] SURFACE-STRUCTURE ANALYSIS BY MEANS OF RUTHERFORD SCATTERING - METHODS TO STUDY SURFACE RELAXATION [J].

TURKENBURG, WC ;

SOSZKA, W ;

SARIS, FW ;

KERSTEN, HH ;

COLENBRANDER, BG .

NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :587-602

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