SOLID PARTICLE EROSION - A STATISTICAL-METHOD FOR EVALUATION OF STRENGTH PROPERTIES OF SEMICONDUCTING MATERIALS

被引:10
作者
JOHANSSON, S
ERICSON, F
SCHWEITZ, JA
机构
[1] Uppsala Univ, Uppsala, Swed, Uppsala Univ, Uppsala, Swed
关键词
SINGLE-CRYSTAL SEMICONDUCTORS - SOLID-PARTICLE IMPACT - SURFACE EROSION;
D O I
10.1016/0043-1648(87)90202-X
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
(Edited Abstract)
引用
收藏
页码:107 / 120
页数:14
相关论文
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