SOLID PARTICLE EROSION - A STATISTICAL-METHOD FOR EVALUATION OF STRENGTH PROPERTIES OF SEMICONDUCTING MATERIALS

被引:10
作者
JOHANSSON, S
ERICSON, F
SCHWEITZ, JA
机构
[1] Uppsala Univ, Uppsala, Swed, Uppsala Univ, Uppsala, Swed
关键词
SINGLE-CRYSTAL SEMICONDUCTORS - SOLID-PARTICLE IMPACT - SURFACE EROSION;
D O I
10.1016/0043-1648(87)90202-X
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
(Edited Abstract)
引用
收藏
页码:107 / 120
页数:14
相关论文
共 21 条
[11]   INDENTATION FRACTURE - PRINCIPLES AND APPLICATIONS [J].
LAWN, B ;
WILSHAW, R .
JOURNAL OF MATERIALS SCIENCE, 1975, 10 (06) :1049-1081
[12]   MECHANICS OF STRENGTH-DEGRADING CONTACT FLAWS IN SILICON [J].
LAWN, BR ;
MARSHALL, DB ;
CHANTIKUL, P .
JOURNAL OF MATERIALS SCIENCE, 1981, 16 (07) :1769-1775
[13]   EFFECT OF SLIDING FRICTION FORCES ON THE STRENGTH OF BRITTLE MATERIALS [J].
LAWN, BR ;
WIEDERHORN, SM ;
ROBERTS, DE .
JOURNAL OF MATERIALS SCIENCE, 1984, 19 (08) :2561-2569
[14]  
Marshall D. B., 1983, Progress in Nitrogen Ceramics. Proceedings of the NATO Advanced Study Institute, P635
[15]   SILICON AS A MECHANICAL MATERIAL [J].
PETERSEN, KE .
PROCEEDINGS OF THE IEEE, 1982, 70 (05) :420-457
[16]  
Roberts S. G., 1983, J PHYS C SOLID STATE, V44, pC4
[17]   EROSION OF SILICON SINGLE-CRYSTALS [J].
ROUTBORT, JL ;
SCATTERGOOD, RO ;
KAY, EW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1980, 63 (11-1) :635-640
[18]   VELOCITY EXPONENT IN SOLID-PARTICLE EROSION OF SILICON [J].
SCATTERGOOD, RO ;
ROUTBORT, JL .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1983, 66 (10) :C184-C186
[19]  
SCATTERGOOD RO, 1980, WEAR, V59, P363
[20]   EROSION CLASSIFICATION OF MATERIALS USING A CENTRIFUGAL EROSION TESTER [J].
SODERBERG, S ;
HOGMARK, S ;
ENGMAN, U ;
SWAHN, H .
TRIBOLOGY INTERNATIONAL, 1981, 14 (06) :333-343