DIFFUSION AND SELF-GETTERING OF ION-IMPLANTED COPPER IN POLYIMIDE

被引：41

作者：

DAS, JH

MORRIS, JE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 12期

关键词：

D O I：

10.1063/1.343652

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5816 / 5820

页数：5

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