EXPERIMENTAL-EVIDENCE FOR NUCLEATION DURING THIN-FILM REACTIONS

被引：97

作者：

COFFEY, KR

CLEVENGER, LA

BARMAK, K

RUDMAN, DA

THOMPSON, CV

机构：

来源：

关键词：

D O I：

10.1063/1.102447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：852 / 854

页数：3

共 10 条

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[2] Kinetics of phase change I - General theory
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[6] REACTION-KINETICS OF NICKEL SILICON MULTILAYER FILMS
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TU, KN
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (10) : 795 - 797
[7] CLEVENGER LA, 1989, 1ST MRS INT M ADV MA, V10, P431
[8] COFFEY KR, 1989, THESIS MIT
[9] Johnson WA, 1939, T AM I MIN MET ENG, V135, P416
[10] TU KN, 1975, THIN SOLID FILMS, V25, P4031