MICROTRIBOLOGICAL PROPERTIES AND POTENTIAL APPLICATIONS OF HARD, LUBRICATING COATINGS

Microtribology is a key technology in the information industry. In this field, atomic-scale wear and friction fluctuations degrade equipment performance. New hard, lubricating films seem to be useful in reducing wear and friction fluctuations. This paper discusses a practical surface material composition model that reduces atomic-scale wear ("achieving microtribological zero-wear"). Fluorinated silicon-containing carbon film is suggested for the surface material. The microtribological characteristics of silicon-containing carbon film are improved by fluorination, which reduces the surface energy, atomic-scale wear and friction force fluctuations.