ION INCIDENT ANGLE DEPENDENCE OF RIDGE SHAPES FORMED ON [111] ORIENTED GD3GA5O12 BY ION-BEAM ETCHING

被引：5

作者：

KATOH, Y

SUGIMOTO, N

TATE, A

SHIBUKAWA, A

机构：

[1] NTT Opto-Electronics Laboratories, Tokai, Ibaraki

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1992年 / 31卷 / 5A期

关键词：

GARNET; WAVE-GUIDE; OPTICAL ISOLATOR; ION-BEAM ETCHING;

D O I：

10.1143/JJAP.31.L591

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A ridge pattern is formed on a [111] oriented Gd3Ga5O12 (GGG) substrate using an argon ion-beam etching at various ion incident angles between 90-degrees and 45-degrees. The relation between the ridge shapes and the ion incident angles is studied. The applicability of a phosphoric acid treatment after the ion-beam etching to smooth the ridge side wall is also examined. The ridge shape strongly depends on the ion incident angle. The phosphoric acid treatment causes a noticeable change of ridge shape dependent on the GGG crystal structure.

引用

收藏

页码：L591 / L593

页数：3

相关论文

共 11 条

[1] WAVE-GUIDE MAGNETO-OPTIC ISOLATOR FABRICATED BY LASER ANNEALING [J].

ANDO, K ;

OKOSHI, T ;

KOSHIZUKA, N .

APPLIED PHYSICS LETTERS, 1988, 53 (01) :4-6

[2]

GOKAN H, 1981, J VAC SCI TECHNOL, V16, P28

[3] DISSOLUTION OF GGG SINGLE-CRYSTAL SPHERES IN ACIDS [J].

HARTMANN, E ;

BEREGI, E ;

LABAR, J .

JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) :191-196

[4] DISSOLUTION FORMS OF GADOLINIUM GALLIUM GARNET AND YTTRIUM-IRON-GARNET OBTAINED IN LEAD-OXIDE BORON TRIOXIDE FLUX [J].

HEIMANN, RB ;

TOLKSDORF, W .

JOURNAL OF CRYSTAL GROWTH, 1983, 62 (01) :75-86

[5] DOUBLE-LAYERED MAGNETOOPTIC CHANNEL WAVE-GUIDE FOR WAVE-GUIDE ISOLATOR APPLICATION [J].

KAEWSURIYATHUMRONG, S ;

MIZUMOTO, T ;

MAK, HM ;

NAITO, Y .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1990, 8 (02) :177-182

[6] AR ION-BEAM ETCHING OF GADOLINIUM-GALLIUM GARNET [J].

KATOH, Y ;

SUGIMOTO, N ;

TATE, A ;

SHIBUKAWA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (01) :141-142

[7] ETCH RATE OF GADOLINIUM GALLIUM GARNET IN CONCENTRATED PHOSPHORIC-ACID OF VARYING COMPOSITION [J].

MILLER, DC .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (12) :1771-1774

[8]

OKAMURA Y, 1989, SPIE, V1177, P354

[9] LIGHT GUIDANCE AND MODE CONVERSION IN MAGNETOOPTIC BURIED CHANNEL WAVE-GUIDES [J].

PROSS, E ;

DAMMANN, H ;

TOLKSDORF, W .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :3849-3855

[10] FACET FORMATION OF YTTRIUM-IRON-GARNET LAYERS GROWN EPITAXIALLY ON SPHERES [J].

TOLKSDORF, W ;

BARTELS, I .

JOURNAL OF CRYSTAL GROWTH, 1981, 54 (03) :417-424