DETERMINATION OF BULK DIFFUSION LENGTH IN THIN SEMICONDUCTOR LAYERS BY SEM-EBIC

被引：27

作者：

DIMITRIADIS, CA ^{[1
]}

机构：

[1] UNIV MANCHESTER,INST SCI & TECHNOL,DEPT ELECT ENGN,MANCHESTER M60 1QD,LANCASHIRE,ENGLAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 12期

关键词：

D O I：

10.1088/0022-3727/14/12/016

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：2269 / 2274

页数：6

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