DEPOSITION OF PYROCARBON IN A LOW-TEMPERATURE ENVIRONMENT

被引：5

作者：

INSPEKTOR, A

CARMI, U

RAVEH, A

KHAIT, Y

AVNI, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573931

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：375 / 378

页数：4

共 16 条

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[5] CHARACTERIZATION OF PYROLYTIC CARBON DEPOSITED ON GRAPHITE SUBSTRATES IN INDUCTIVE RF-PLASMAS OF PROPYLENE AND ARGON [J].

INSPEKTOR, A ;

HORNIK, Y ;

CARMI, U ;

AVNI, R ;

WALLURA, E ;

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NICKEL, H .

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[6]

INSPEKTOR A, 1981, PLASMA CHEM PLASMA P, V1, P377

[7] MICROSTRUCTURES OF ISOTROPIC PYROLYTIC CARBONS [J].

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[8] THE DEPENDENCE OF COATING IN INDUCTIVE RF PLASMAS ON GAS-FLOW VELOCITY, PRESSURE AND RF POWER [J].

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INSPEKTOR, A ;

AVNI, R .

THIN SOLID FILMS, 1980, 72 (02) :249-260

[9]

KHAIT YL, 1983, S P ISPC 6, V3, P729

[10]

KHAIT YL, 1985, 7TH INT S PLASM CHEM

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