COMPARISON OF ANNEALING AND ION-IMPLANTATION EFFECTS DURING SOLID-STATE DISILICIDE FORMATION

[1] RADIATION EFFECTS ON SOLID-STATE DIFFUSION [J]. THIN SOLID FILMS, 1975, 25 (01) : 107 - 156

[2] ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES [J]. APPLIED PHYSICS LETTERS, 1978, 33 (04) : 289 - 290

[3] FORMATION OF SILICIDES IN MO-W BILAYER FILMS ON SI SUBSTRATES - MARKER EXPERIMENT [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) : 641 - 661

[4] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2841 - 2846

[5] BARTLETT R, 1969, T AIME, V230, P158

[6] REDISTRIBUTION OF BORON IN SILICON AFTER HIGH-TEMPERATURE PROTON IRRADIATION [J]. APPLIED PHYSICS LETTERS, 1975, 26 (03) : 77 - 80

[7] DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517

[8] DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) : 4444 - 4452

[9] VOLUME INTERDIFFUSION IN MOLYBDENUM-TUNGSTEN SYSTEM [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 6 (02): : 543 - &

[10] HANSEN M, 1958, CONSTITUTION BINARY, P981

[1] RADIATION EFFECTS ON SOLID-STATE DIFFUSION [J]. THIN SOLID FILMS, 1975, 25 (01) : 107 - 156

[2] ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES [J]. APPLIED PHYSICS LETTERS, 1978, 33 (04) : 289 - 290

[3] FORMATION OF SILICIDES IN MO-W BILAYER FILMS ON SI SUBSTRATES - MARKER EXPERIMENT [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) : 641 - 661

[4] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2841 - 2846

[5] BARTLETT R, 1969, T AIME, V230, P158

[6] REDISTRIBUTION OF BORON IN SILICON AFTER HIGH-TEMPERATURE PROTON IRRADIATION [J]. APPLIED PHYSICS LETTERS, 1975, 26 (03) : 77 - 80

[7] DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517

[8] DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) : 4444 - 4452

[9] VOLUME INTERDIFFUSION IN MOLYBDENUM-TUNGSTEN SYSTEM [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 6 (02): : 543 - &

[10] HANSEN M, 1958, CONSTITUTION BINARY, P981