ELECTRICAL-PROPERTIES OF PARAELECTRIC (PB0.72LA0.28)TIO3 THIN-FILMS WITH HIGH LINEAR DIELECTRIC PERMITTIVITY - SCHOTTKY AND OHMIC CONTACTS

被引:81
作者
DEY, SK [1 ]
LEE, JJ [1 ]
ALLURI, P [1 ]
机构
[1] ARIZONA STATE UNIV,CTR SOLID STATE SCI & ELECTR RES,TEMPE,AZ 85287
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 6A期
关键词
PARAELECTRIC; PLT; DIELECTRIC THIN FILM; HIGH DIELECTRIC PERMITTIVITY THIN FILM; SCHOTTKY BARRIER; DEPLETION LAYER; INTERFACIAL CAPACITANCE;
D O I
10.1143/JJAP.34.3142
中图分类号
O59 [应用物理学];
学科分类号
摘要
Linear, paraelectric (Pb0.72La0.28)TiO3 or PLT(28) thin films with a bandgap > 3 eV were deposited on Pt/Ti/SiO2/Si substrates by the sol-gel technique. Specific top-contact metals from two distinct groups (i.e., non-noble or M(T) and noble or M(N); the former being oxidizable transition metals) were selected to understand the electrical nature of the interfaces in terms of electrode dependent energy band diagrams and equivalent circuit models. Using a high sensitivity high-pass filter circuit to evaluate the charging and discharging behavior coupled with results of the thickness and voltage dependence of capacitance, it was determined that M(T) (Ni,Cr,Ti) and M(N) (Pt,Au,Ag) metals form Ohmic and Schottky contacts, respectively. Supported by thermochemical data and calculations, the ohmic M(T)-PLT interfaces are envisioned to be of the form: M(T)-M(T)O(x)-n(+)PLT-nPLT. In contrast, the M(N)-PLT interfaces may be characterized by a metal work function independent Schottky diode; the surface Fermi level being pinned at the mid-gap. For example, a Schottky barrier height of 1.83 eV and a built-in voltage of 1.3 eV at the Pt-PLT interface were estimated. From low field capacitance measurements, the ratio of interfacial to bulk resistance, R(i)/R(b), was estimated to be 23.
引用
收藏
页码:3142 / 3152
页数:11
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