ELECTRON SENSITIVE NEGATIVE RESISTS OF VINYLAROMATIC POLYMERS

被引:6
作者
JAGT, JC
SEVRIENS, APG
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D O I
10.1002/pen.760201609
中图分类号
TQ [化学工业];
学科分类号
0817 ;
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页码:1082 / 1086
页数:5
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共 23 条
[11]   EXPERIMENTAL-OBSERVATIONS OF NEARLY MONODISPERSE POLYSTYRENE AS NEGATIVE ELECTRON RESISTS [J].
LAI, JH ;
SHEPHERD, LT .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) :696-698
[13]  
ORDNUNG PF, ADA044282 US NTIS AD
[14]   POLY-N-VINYLHALOGENOCARBAZOLE .1. SYNTHESIS OF N-VINYLHALOGENOCARBAZOLE [J].
PIELICHO.J ;
KYZIO, J .
JOURNAL OF POLYMER SCIENCE PART C-POLYMER LETTERS, 1974, 12 (05) :257-260
[15]   BROMINATION OF CARBAZOLE AND 9-VINYLCARBAZOLE [J].
PIELICHOWSKI, J ;
KYZIOL, J .
MONATSHEFTE FUR CHEMIE, 1974, 105 (06) :1306-1312
[16]   PHOTOLYSIS OF AROMATIC AZIDES .2. FORMATION AND SPECTRA OF DINITRENES [J].
REISER, A ;
WAGNER, HM ;
MARLEY, R ;
BOWES, G .
TRANSACTIONS OF THE FARADAY SOCIETY, 1967, 63 (538P) :2403-&
[17]   SOLUTION PROPERTIES OF POLY-N-VINYLCARBAZOLE [J].
SITARAMAIAH, G ;
JACOBS, D .
POLYMER, 1970, 11 (03) :165-+
[18]  
TERRELL DR, COMMUNICATION
[19]   NEGATIVE ELECTRON RESISTS FOR DIRECT FABRICATION OF DEVICES [J].
THOMPSON, LF ;
STILLWAGON, LE ;
DOERRIES, EM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :938-943
[20]  
THOMPSON LF, 1974, SOLID STATE TECHNOL, V27, P41