INFLUENCE OF THICKNESS ON H-2 GAS SENSOR PROPERTIES IN POLYCRYSTALLINE SNOX FILMS PREPARED BY ION-BEAM SPUTTERING

被引：27

作者：

SUZUKI, T

YAMAZAKI, T

YOSHIOKA, H

HIKICHI, K

机构：

来源：

关键词：

D O I：

10.1007/BF01154021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1106 / 1111

页数：6

共 12 条

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[7] Seki H., 1984, Yogyo-Kyokai-Shi, V92, P219, DOI 10.2109/jcersj1950.92.1064_219
[8] RESISTIVITY ANOMALIES IN TIN OXIDE THIN-FILMS
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[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (09) : 1086 - 1088
[9] ION-BEAM SPUTTERING APPARATUS WITH A SIMPLIFIED ACCELERATOR SYSTEM FOR DEPOSITION OF THIN-FILMS
SUZUKI, T
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[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (04) : 437 - 438
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