ANGLE-OF-DEPOSITION EFFECTS IN EVAPORATED AMORPHOUS-GERMANIUM

被引:1
作者
KINNEY, WI [1 ]
CARGILL, GS [1 ]
机构
[1] YALE UNIV,DEPT ENGN & APPL SCI,NEW HAVEN,CT 06520
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1977年 / 40卷 / 01期
关键词
D O I
10.1002/pssa.2210400104
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:37 / 42
页数:6
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