ABSOLUTE CROSS-SECTIONS FOR THE ELECTRON-IMPACT IONIZATION OF THE NF2 AND NF FREE-RADICALS

被引:21
作者
TARNOVSKY, V
LEVIN, A
BECKER, K
机构
[1] Department of Physics, City College of the City University of New York, New York
关键词
D O I
10.1063/1.467129
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report measurements of the absolute cross sections for the electron-impact ionization of the NF2 and NF free radicals from threshold to 200 eV At 70 eV, the absolute parent NF2 and NF ionization cross section are 1.25+/-0.23 angstrom2 and 1.05+/-0.19 angstrom2, respectively. We found little evidence of the presence of vibrationally excited radicals in the incident target beam for both NF2 and NF. We also studied the dissociative ionization of NF2 and NF. The absolute cross section for the formation of the NF+ fragment ions from NF2 was found to be 0.75+/-0.15 angstrom2 at 70 eV The NF+ fragment ions are formed with little excess kinetic energy. The only significant pathway leading to the observed NF+ fragment ions is the single positive ion formation. Our data show no indication of the presence of double positive ion formation channels or positive-negative ion pair formation processes. Cross sections for the formation of the atomic fragment ions F+ and N+ from both NF2 as well as NF were found to be small with maximum values of less than 0.1 angstrom2 at 70 eV in all cases.
引用
收藏
页码:5626 / 5630
页数:5
相关论文
共 32 条
[1]  
BASNER R, 1993, COMMUNICATION
[2]  
Becker K H, 1990, NONEQUILIBRIUM PROCE
[3]   ABSOLUTE CROSS-SECTIONS FOR FLUORINE 3P-]3S LINE EMISSIONS FOLLOWING SINGLE ELECTRON-IMPACT ON NF3, CF4, AND SF6 [J].
BLANKS, KA ;
TABOR, AE ;
BECKER, K .
JOURNAL OF CHEMICAL PHYSICS, 1987, 86 (09) :4871-4875
[4]   OPTICAL-EMISSIONS IN THE WAVELENGTH REGION 2000-6000 A PRODUCED BY ELECTRON-IMPACT DISSOCIATION OF NF3, CF4 AND SF6 [J].
BLANKS, KA ;
BECKER, K .
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1987, 20 (22) :6157-6163
[5]   ON THE PARTIAL IONIZATION CROSS-SECTIONS FOR CF4 BY USE OF THE PULSED-ELECTRON-BEAM TIME-OF-FLIGHT METHOD [J].
BRUCE, MR ;
BONHAM, RA .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1993, 123 (02) :97-100
[6]  
CHASE MW, 1985, J PHYS CHEM REF DATA, V14, P1
[7]   PLASMA-ETCHING OF SPUTTERED MO AND MOSI2 THIN-FILMS IN NF3 GAS-MIXTURES [J].
CHOW, TP ;
STECKL, AJ .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) :5531-5540
[8]   CALCULATION OF ABSOLUTE ELECTRON-IMPACT IONIZATION CROSS-SECTION FUNCTIONS FOR SINGLE IONIZATION OF HE, NE, AR, KR, XE, N AND F [J].
DEUTSCH, H ;
MARK, TD .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 1987, 79 (03) :R1-R8
[9]   TOTAL ELECTRON-IMPACT IONIZATION CROSS-SECTIONS OF FREE MOLECULAR RADICALS - A CASE OF FAILURE OF THE ADDITIVITY RULE [J].
DEUTSCH, H ;
MARGREITER, D ;
MARK, TD .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1989, 93 (02) :259-264
[10]  
DEUTSCH H, UNPUB INT J MASS SPE