MONOLITHIC INTEGRATION OF OPTICAL WAVE-GUIDE CIRCUITRY WITH III-V PHOTODETECTORS FOR ADVANCED LIGHTWAVE RECEIVERS

被引：41

作者：

DERI, RJ ^{[1
]}

机构：

[1] BELLCORE,RED BANK,NJ 07701

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1993年 / 11卷 / 08期

关键词：

D O I：

10.1109/50.254088

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We review recent progress in monolithic waveguide-photodetector integration on III-V semiconductors for applications in the 0.8-1.6-mum wavelength range. Critical issues for device performance and fabrication are discussed, followed by a description of the underlying optical coupling mechanisms. Tradeoffs between performance and integrability are assessed in detail for vertical and butt coupling and their variants. We show how appropriately chosen integration techniques have led to a variety of monolithic devices for advanced lightwave receivers.

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页码：1296 / 1313

页数：18

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