THEORY OF MICROSTRUCTURAL DEPTH PROFILING BY PHOTOTHERMAL MEASUREMENTS

被引：67

作者：

LAN, TTN

SEIDEL, U

WALTHER, HG

机构：

[1] Friedrich-Schiller-Universität Jena, Institut für Optik und Quantenelektronik, 07743 Jena

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 77卷 / 09期

关键词：

D O I：

10.1063/1.359409

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An analytical solution for the photothermally measurable surface temperature of a sample with piecewise linearly inhomogeneous depth profile of the thermal conductivity k is presented. Based on this solution an inversion algorithm using a sequence of one-parameter fits is suggested in order to estimate the k profile. Numerical simulations demonstrate the performance of the approach and its insensitivity to random errors. © 1995 American Institute of Physics.

引用

页码：4739 / 4745

页数：7

共 13 条

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