ELECTRONIC BEAM-INDUCED POLING OF BATIO3 THIN-FILMS

被引：7

作者：

LU, HA

WILLS, LA

WESSELS, BW

LIN, WP

WONG, GK

机构：

[1] NORTHWESTERN UNIV, DEPT PHYS, EVANSTON, IL 60208 USA

[2] NORTHWESTERN UNIV, MAT RES CTR, EVANSTON, IL 60208 USA

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.109886

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of electron beam irradiation on second harmonic generation of BaTiO3 thin films was studied. Enhanced second harmonic intensity was measured from BaTiO3 thin films irradiated by electron beams of 10, 15, and 25 keV using a scanning electron microscope. The enhancement of the second harmonic generations is attributed to the electron beam-induced poling of the film. The effectiveness of the electron beam irradiation on second harmonic generation enhancement is comparable to that of the corona poling of the film at room temperature. This electron beam induced poling technique offers a promising method for nonlinear optical device fabrication.

引用

页码：874 / 876

页数：3

共 18 条

[11] RADIATION-DAMAGE PROCESSES AFFECTING ELECTRON-BEAM LITHOGRAPHY OF INORGANIC MATERIALS [J].