SPUTTER DEPOSITION OF YBA2CU3O7-X FILMS USING A HEMISPHERICAL TARGET IN A HG VAPOR TRIODE PLASMA

被引：26

作者：

WEHNER, GK ^{[1
]}

KIM, YH ^{[1
]}

KIM, DH ^{[1
]}

GOLDMAN, AM ^{[1
]}

机构：

[1] UNIV MINNESOTA,SCH PHYS & ASTRON,MINNEAPOLIS,MN 55455

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 14期

关键词：

D O I：

10.1063/1.99671

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1187 / 1189

页数：3

共 12 条

[1] LOW-TEMPERATURE PROCESS FOR THE PREPARATION OF HIGH-TC SUPERCONDUCTING THIN-FILMS [J].

ADACHI, H ;

HIROCHI, K ;

SETSUNE, K ;

KITABATAKE, M ;

WASA, K .

APPLIED PHYSICS LETTERS, 1987, 51 (26) :2263-2265

[2] ATOM EJECTION PATTERNS IN SINGLE-CRYSTAL SPUTTERING [J].

ANDERSON, GS ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (12) :2305-2313

[3]

BETZ G, 1983, TOPICS APPLIED PHYSI, V52

[4] CRITICAL-CURRENT MEASUREMENTS IN EPITAXIAL-FILMS OF YBA2CU3O7-X COMPOUND [J].

CHAUDHARI, P ;

KOCH, RH ;

LAIBOWITZ, RB ;

MCGUIRE, TR ;

GAMBINO, RJ .

PHYSICAL REVIEW LETTERS, 1987, 58 (25) :2684-2686

[5] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS [J].

KOCH, RH ;

UMBACH, CP ;

CLARK, GJ ;

CHAUDHARI, P ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :200-202

[6] CRITICAL CURRENT DENSITIES AND TRANSPORT IN SUPERCONDUCTING YBA2CU3O7-DELTA FILMS MADE BY ELECTRON-BEAM COEVAPORATION [J].

OH, B ;

NAITO, M ;

ARNASON, S ;

ROSENTHAL, P ;

BARTON, R ;

BEASLEY, MR ;

GEBALLE, TH ;

HAMMOND, RH ;

KAPITULNIK, A .

APPLIED PHYSICS LETTERS, 1987, 51 (11) :852-854

[7] MASS EFFECTS ON ANGULAR-DISTRIBUTION OF SPUTTERED ATOMS [J].

OLSON, RR ;

KING, ME ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) :3677-3683

[8] MAGNETRON SPUTTERING AND LASER PATTERNING OF HIGH TRANSITION-TEMPERATURE CU OXIDE-FILMS [J].

SCHEUERMANN, M ;

CHI, CC ;

TSUEI, CC ;

YEE, DS ;

CUOMO, JJ ;

LAIBOWITZ, RB ;

KOCH, RH ;

BRAREN, B ;

SRINIVASAN, R ;

PLECHATY, MM .

APPLIED PHYSICS LETTERS, 1987, 51 (23) :1951-1953

[9] HIGH SUPERCONDUCTING TRANSITION-TEMPERATURES IN SPUTTER-DEPOSITED YBACUO THIN-FILMS [J].

SOMEKH, RE ;

BLAMIRE, MG ;

BARBER, ZH ;

BUTLER, K ;

JAMES, JH ;

MORRIS, GW ;

TOMLINSON, EJ ;

SCHWARZENBERGER, AP ;

STOBBS, WM ;

EVETTS, JE .

NATURE, 1987, 326 (6116) :857-859

[10] GROWTH OF HIGH-TC SUPERCONDUCTING THIN-FILMS USING MOLECULAR-BEAM EPITAXY TECHNIQUES [J].

WEBB, C ;

WENG, SL ;

ECKSTEIN, JN ;

MISSERT, N ;

CHAR, K ;

SCHLOM, DG ;

HELLMAN, ES ;

BEASLEY, MR ;

KAPITULNIK, A ;

HARRIS, JS .

APPLIED PHYSICS LETTERS, 1987, 51 (15) :1191-1193

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