A GLOW-DISCHARGE MASS-SPECTROMETRY STUDY OF REACTIVE SPUTTERING

被引：22

作者：

HECQ, M

HECQ, A

机构：

来源：

THIN SOLID FILMS | 1981年 / 76卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90063-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：35 / 43

页数：9

共 29 条

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