A NEW ANALYZING METHOD FOR NONUNIFORMLY DOPED MOS CAPACITOR C-T CHARACTERISTICS IN LIFETIME EVALUATION

被引：4

作者：

MIYAKE, M

HARADA, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 11期

关键词：

D O I：

10.1143/JJAP.20.L797

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L797 / L800

页数：4

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