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GROWTH-CONDITIONS OF DEPOSITED SI FILMS IN SOLID-PHASE EPITAXY
被引:37
作者
:
SAITOH, S
论文数:
0
引用数:
0
h-index:
0
SAITOH, S
SUGII, T
论文数:
0
引用数:
0
h-index:
0
SUGII, T
ISHIWARA, H
论文数:
0
引用数:
0
h-index:
0
ISHIWARA, H
FURUKAWA, S
论文数:
0
引用数:
0
h-index:
0
FURUKAWA, S
机构
:
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS
|
1981年
/ 20卷
/ 02期
关键词
:
D O I
:
10.1143/JJAP.20.L130
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:L130 / L132
页数:3
相关论文
共 3 条
[1]
EVIDENCE FOR VOID INTERCONNECTION IN EVAPORATED AMORPHOUS-SILICON FROM EPITAXIAL CRYSTALLIZATION MEASUREMENTS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
POATE, JM
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 59
-
61
[2]
DONOVAN TM, 1971, PHYS REV LETT, V27, P1974
[3]
EFFECT OF STRUCTURE AND IMPURITIES ON THE EPITAXIAL REGROWTH OF AMORPHOUS-SILICON
FOTI, G
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
FOTI, G
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
POATE, JM
MAGEE, CW
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
MAGEE, CW
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(10)
: 840
-
842
←
1
→
共 3 条
[1]
EVIDENCE FOR VOID INTERCONNECTION IN EVAPORATED AMORPHOUS-SILICON FROM EPITAXIAL CRYSTALLIZATION MEASUREMENTS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
POATE, JM
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 59
-
61
[2]
DONOVAN TM, 1971, PHYS REV LETT, V27, P1974
[3]
EFFECT OF STRUCTURE AND IMPURITIES ON THE EPITAXIAL REGROWTH OF AMORPHOUS-SILICON
FOTI, G
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
FOTI, G
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
POATE, JM
MAGEE, CW
论文数:
0
引用数:
0
h-index:
0
机构:
RCA LABS,PRINCETON,NJ 08540
RCA LABS,PRINCETON,NJ 08540
MAGEE, CW
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(10)
: 840
-
842
←
1
→