XPS STUDY ON THE EARLY STAGES OF OXIDATION OF SI(100) BY ATOMIC OXYGEN

被引：60

作者：

NAMIKI, A ^{[1
]}

TANIMOTO, K ^{[1
]}

NAKAMURA, T ^{[1
]}

OHTAKE, N ^{[1
]}

SUZAKI, T ^{[1
]}

机构：

[1] TOYOKO KAGAKU CO LTD,NAKAMARUKO,KAWASAKI 211,JAPAN

来源：

SURFACE SCIENCE | 1989年 / 222卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(89)90377-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：530 / 554

页数：25

共 30 条

[1] CHEMISORPTION OF ATOMIC OXYGEN ON SI(100) - SELF-CONSISTENT CLUSTER AND SLAB MODEL INVESTIGATIONS [J].

BATRA, IP ;

BAGUS, PS ;

HERMANN, K .

PHYSICAL REVIEW LETTERS, 1984, 52 (05) :384-387

[2] EFFECT OF ELECTROSTATIC SCREENING ON ENERGY POSITIONS OF ELECTRON-SPECTRA NEAR SIO2/SI INTERFACES [J].

BROWNING, R ;

SOBOLEWSKI, MA ;

HELMS, CR .

PHYSICAL REVIEW B, 1988, 38 (18) :13407-13410

[3]

CHADI DJ, 1979, J VAC SCI TECHNOL, V16, P1683

[4] INTERPRETATION OF THE SPECTRA OBTAINED FROM OXYGEN-ADSORBED AND OXIDIZED SILICON SURFACES [J].

CIRACI, S ;

ELLIALTIOGLU, S ;

ERKOC, S .

PHYSICAL REVIEW B, 1982, 26 (10) :5716-5729

[5] KINETICS OF THE ADSORPTION OF O-2 AND OF THE DESORPTION OF SIO ON SI(100) - A MOLECULAR-BEAM, XPS, AND ISS STUDY [J].

DEVELYN, MP ;

NELSON, MM ;

ENGEL, T .

SURFACE SCIENCE, 1987, 186 (1-2) :75-114

[6] OXIDATION OF THE SI(111) (7X7) SURFACE - ELECTRON-ENERGY LOSS SPECTROSCOPY, LOW-ENERGY ELECTRON-DIFFRACTION, AND AUGER-ELECTRON SPECTROSCOPY STUDIES [J].

EDAMOTO, K ;

KUBOTA, Y ;

KOBAYASHI, H ;

ONCHI, M ;

NISHIJIMA, M .

JOURNAL OF CHEMICAL PHYSICS, 1985, 83 (01) :428-436

[7] HIGH-RESOLUTION X-RAY PHOTOELECTRON-SPECTROSCOPY AS A PROBE OF LOCAL ATOMIC-STRUCTURE - APPLICATION TO AMORPHOUS SIO2 AND THE SI-SIO2 INTERFACE [J].

GRUNTHANER, FJ ;

GRUNTHANER, PJ ;

VASQUEZ, RP ;

LEWIS, BF ;

MASERJIAN, J ;

MADHUKAR, A .

PHYSICAL REVIEW LETTERS, 1979, 43 (22) :1683-1686

[8]

HATTORI T, IN PRESS JAPAN J APP

[9]

HOFFFER U, 1985, PHYS REV LETT, V55, P2979

[10] PROBING THE TRANSITION LAYER AT THE SIO2-SI INTERFACE USING CORE LEVEL PHOTOEMISSION [J].

HOLLINGER, G ;

HIMPSEL, FJ .

APPLIED PHYSICS LETTERS, 1984, 44 (01) :93-95

← 1 2 3 →