SILICON-REFRACTORY METAL INTERFACES - EVIDENCE OF ROOM-TEMPERATURE INTERMIXING FOR SI-CR

被引：35

作者：

FRANCIOSI, A

PETERMAN, DJ

WEAVER, JH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571080

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：657 / 660

页数：4

共 39 条

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