ELECTRICAL AND SPIN-RESONANCE CHARACTERISTICS OF LOW-TEMPERATURE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITED SIO2

被引：21

作者：

DEVINE, RAB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 10期

关键词：

D O I：

10.1063/1.343828

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4702 / 4708

页数：7

共 22 条

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