LOW-OPTICAL-LOSS GLASS THIN-FILMS

被引：7

作者：

GUPTA, MC

机构：

[1] Eastman Kodak Company, Diversified Technologies Group, Research Laboratories, Rochester, NY

来源：

APPLIED OPTICS | 1990年 / 29卷 / 28期

关键词：

Integrated optics; Optical materials; Thin films;

D O I：

10.1364/AO.29.004310

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Low-optical-loss glass thin films have been prepared using sputtering and electron beam deposition methods. Results of film composition and optical property measurements are presented. Glass films have been prepared with optical loss values of 0.5 dB/cm. We discuss factors limiting the reduction in optical loss for sputtered and vapor-deposited films. These films can be easily patterned using standard photolithographic processes for fabrication of integrated optics components, such as grating couplers and planar lenses. © 1990 Optical Society of America.

引用

页码：4310 / 4313

页数：4

共 13 条

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