SOME PROPERTIES OF RF PLANAR MAGNETRON-SPUTTERED CORNING-7059 GLASS-FILMS

被引：4

作者：

JEROMINEK, H

PATELA, S

POMERLEAU, JYD

DELISLE, C

TREMBLAY, R

机构：

来源：

THIN SOLID FILMS | 1987年 / 146卷 / 02期

关键词：

D O I：

10.1016/0040-6090(87)90221-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：191 / 200

页数：10

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