DAMAGE STRUCTURES IN SI3N4-SIC FILMS AND STAINLESS-STEEL IRRADIATED BY INTENSE PULSED LIGHT-ION BEAM

被引：4

作者：

KAMATA, K

YATSUI, K

KANNO, M

AIZAWA, N

MORIYAMA, M

机构：

来源：

LASER AND PARTICLE BEAMS | 1987年 / 5卷

关键词：

D O I：

10.1017/S0263034600002986

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：495 / 504

页数：10

共 15 条

[1]

FUKUTOMI M, 1983, CERAMICS, V18, P567

[2]

HASHIGUCHI R, 1980, GENSHIRYOKU KOGYO, V26, P31

[3]

HAYAKAWA S, 1982, HAKUMAKU GIJYUTSU, P69

[4] PREPARATION OF AMORPHOUS SI3N4-C PLATE BY CHEMICAL VAPOR-DEPOSITION [J].

HIRAI, T ;

GOTO, T .

JOURNAL OF MATERIALS SCIENCE, 1981, 16 (01) :17-23

[5]

Kamata K., 1986, Yogyo-Kyokai-Shi, V94, P12

[6] SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS [J].

LIAU, ZL ;

BROWN, WL ;

HOMER, R ;

POATE, JM .

APPLIED PHYSICS LETTERS, 1977, 30 (12) :626-628

[7]

MIYAGAWA K, 1983, KAKUYUGO KENKYU, V49, P67

[8]

SHIKAMA T, 1984, NIPPON KINZOKU GAKKA, V23, P1014

[9] Rays of Positive Electricity [J].

Thomson, J. J. .

PHILOSOPHICAL MAGAZINE, 1911, 21 (122) :225-249

[10]

UCHIYAMA I, 1972, XRAY MICROANALYZER, P127

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