INVESTIGATIONS OF THE STRUCTURE OF A-C-H FILMS

被引：12

作者：

KLEBER, R

DWORSCHAK, W

GERBER, J

KRUGER, A

JUNG, K

EHRHARDT, H

SCHULZE, S

MUHLING, I

DEUTSCHMANN, S

SCHARFF, W

ENGELKE, F

METZ, H

机构：

[1] TECH UNIV CHEMNITZ,SEKT PHYS ELEKTR BAUELEMENTE,O-9010 KARL MARX STADT,GERMANY

[2] KARL MARX UNIV,SEKT PHYS,O-7010 LEIPZIG,GERMANY

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1991年 / 140卷

关键词：

D O I：

10.1016/0921-5093(91)90512-L

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Amorphous hydrogenated carbon films were prepared in an inductively-coupled 13.56 MHz r.f.-glow discharge. The C2H2 pressure varied between 4 x 10(-4) mbar and 8.2 x 10(-3) mbar. The average ion energies were in the range of about 30-350 eV. The films were characterized by measuring the hardness, stress, density and hydrogen content. Additional investigations were made by visible ion spectroscopy-infrared spectroscopy, electron energy loss spectroscopy and electron diffraction. Magnetic resonance methods like C-13 nuclear magnetic resonance and electron spin resonance have been used to determine the ratio of sp2- to sp3-hybridized C atoms and the spin density.

引用

页码：775 / 779

页数：5

共 20 条

[1] ELECTRON-SPIN-RESONANCE INVESTIGATION OF ION-BEAM MODIFIED AMORPHOUS HYDROGENATED (DIAMOND-LIKE) CARBON [J].