INHOMOGENEITY IN FILMS - LIMITATION OF THE ACCURACY OF OPTICAL MONITORING OF THIN-FILMS

被引：20

作者：

BORGOGNO, JP

BOUSQUET, P

FLORY, F

LAZARIDES, B

PELLETIER, E

ROCHE, P

机构：

来源：

APPLIED OPTICS | 1981年 / 20卷 / 01期

关键词：

D O I：

10.1364/AO.20.000090

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：90 / 94

页数：5

共 13 条

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[9] AUTOMATIC EVALUATION OF OPTICAL-CONSTANTS AND THICKNESS OF THIN-FILMS - APPLICATION TO THIN DIELECTRIC LAYERS [J].

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