SURFACE MODIFICATION AND OTHER ADVANCED ION-BEAM PROCESSING PROJECTS IN JAPAN

被引：6

作者：

YAMADA, I

机构：

[1] Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto

来源：

SURFACE & COATINGS TECHNOLOGY | 1992年 / 51卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(92)90291-H

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The research and development by AMMTRA (Advanced Material-processing and Machining Technology Research Association) of ion beam systems and processing technology, and selected research projects funded in part by Grants-in-Aid on Priority Areas from the Ministry of Education are reviewed. The AMMTRA projects, including five advanced industrial-scale ion beam systems and two processing projects, for silica glass and metal surface modifications, are described. Major research projects which have been funded by the Ministry of Education include X-ray imaging optics, and metal semiconductor interfaces. Ionized cluster beam deposition has been applied in those projects to form highly reflective mirror surfaces and semiconductor metallization with epitaxial metal films.

引用

页码：514 / 521

页数：8

共 15 条

[1] APPLETON BA, 1990, 7TH P INT C ION BEAM
[2] PROPERTIES OF IONIC BOMBARDED SILICON
OHL, RS
[J]. BELL SYSTEM TECHNICAL JOURNAL, 1952, 31 (01): : 104 - 121
[3] FORMATION OF BURIED OXYNITRIDE LAYERS IN SILICA GLASS BY ION-IMPLANTATION
OYOSHI, K
TAGAMI, T
TANAKA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) : 3653 - 3660
[4] OYOSHI K, 1991, SHINKU, V34, P413
[5] INFLUENCE OF NITROGEN IMPLANTATION ON THE HYDROGEN ABSORPTION BY TITANIUM
SUGIZAKI, Y
FURUYA, T
SATOH, H
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 722 - 725
[6] TRILLAT JJ, 1956, J PHYS SOC JPN, V11, P406
[7] RECENT PROGRESS IN DEPOSITING EPITAXIAL METAL-FILMS BY AN IONIZED CLUSTER BEAM
YAMADA, I
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4) : 544 - 549
[8] GROWTH-PROCESSES OF EPITAXIAL METAL-FILMS ON SEMICONDUCTOR AND INSULATOR SUBSTRATES BY IONIZED CLUSTER BEAM
YAMADA, I
[J]. APPLIED SURFACE SCIENCE, 1989, 43 : 23 - 31
[9] PREPARATION OF ATOMICALLY FLAT GOLD-FILMS BY IONIZED CLUSTER BEAM
YAMADA, I
TAKAOKA, GH
USUI, H
SATOH, F
ITOH, Y
YAMASHITA, K
KITAMOTO, S
NAMBA, Y
HASHIMOTO, Y
MAEYAMA, Y
MACHIDA, K
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4) : 876 - 879
[10] ADVANCED ION-BEAM PROCESSING PROJECTS IN JAPAN
YAMADA, I
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 1467 - 1475

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