HOLLOW-CATHODE-ENHANCED MAGNETRON SPUTTERING

[1] DELCROIX JL, 1974, ADV ELECTRONICS ELEC, V36, P265

[2] INERT-GAS THRUSTER TECHNOLOGY [J]. JOURNAL OF SPACECRAFT AND ROCKETS, 1983, 20 (01) : 77 - 83

[3] KAUFMAN HR, 1982, AIAA, V83, P1398

[4] MCCLANAHAN EJ, 1984, AM VACUUM SOC S SAN

[5] HIGH-RATE SPUTTERING TECHNIQUES [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 1 - 11

[6] THORNTON JA, 1978, THIN FILM PROCESSES, P76

[7] PLANAR MAGNETRON SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 179 - 187

[1] DELCROIX JL, 1974, ADV ELECTRONICS ELEC, V36, P265

[2] INERT-GAS THRUSTER TECHNOLOGY [J]. JOURNAL OF SPACECRAFT AND ROCKETS, 1983, 20 (01) : 77 - 83

[3] KAUFMAN HR, 1982, AIAA, V83, P1398

[4] MCCLANAHAN EJ, 1984, AM VACUUM SOC S SAN

[5] HIGH-RATE SPUTTERING TECHNIQUES [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 1 - 11

[6] THORNTON JA, 1978, THIN FILM PROCESSES, P76

[7] PLANAR MAGNETRON SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 179 - 187