Oil removal from metals by linear multi-orifice hollow cathode

被引：20

作者：

Belkind, A

Li, H

Clow, H

Jansen, F

机构：

[1] AIRCO COATING TECHNOL, MANCHESTER, LANCS, ENGLAND

[2] AIRCO COATING TECHNOL, CONCORD, CA USA

来源：

SURFACE & COATINGS TECHNOLOGY | 1995年 / 76-77卷 / 1-3期

关键词：

plasma; cleaning; metal(s); hollow cathode;

D O I：

10.1016/0257-8972(95)02505-7

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A linear multi-orifice hollow cathode oxygen plasma source has been developed for oil removal from moving metal surfaces. The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c, hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantial reduction of carbon-containing contamination on a metal surface after exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact angle with water. This angle is desired to be 10 degrees or less. The contact angle dependence on plasma dose density is described for plasma atmospheres of O-2 and O-2 + CF4 and two different aluminium foil thicknesses.

引用

页码：738 / 743

页数：6

共 22 条

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