METHOD FOR EXAMINING SOLID SPECIMENS WITH IMPROVED RESOLUTION IN SCANNING ELECTRON-MICROSCOPE (SEM)

被引：40

作者：

WELLS, OC ^{[1
]}

BROERS, AN ^{[1
]}

BREMER, CG ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598

来源：

关键词：

D O I：

10.1063/1.1654916

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：353 / 355

页数：3

共 8 条

BROERS, AN .

[2]

BROERS AN, TO BE PUBLISHED

[3] A SCANNING MICROSCOPE WITH 5 A RESOLUTION [J].

CREWE, AV ;

WALL, J .

[4]

KOIKE H, 1971, 29TH ANN P EL MICR S, P28

[5] NEW CONTRAST MECHANISM FOR SCANNING ELECTRON MICROSCOPE [J].

WELLS, OC .

[6] LOW-LOSS IMAGE FOR SURFACE SCANNING ELECTRON MICROSCOPE [J].

WELLS, OC .

[7]

WELLS OC, TO BE PUBLISHED

[8]

WELLS OC, 1972, 5 P SEM S ITT RES I