RECRYSTALLIZATION-DRIVEN MIGRATION OF IMPLANTED IONS IN SAPPHIRE AND RESULTANT-ORIENTED PRECIPITATION

被引：41

作者：

OHKUBO, M

HIOKI, T

KAWAMOTO, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 04期

关键词：

D O I：

10.1063/1.337305

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1325 / 1335

页数：11

共 22 条

[1] CHANGING THE SURFACE MECHANICAL-PROPERTIES OF SILICON AND ALPHA-AL2O3 BY ION-IMPLANTATION [J].

BURNETT, PJ ;

PAGE, TF .

JOURNAL OF MATERIALS SCIENCE, 1984, 19 (11) :3524-3545

[2]

BURNETT PJ, 1984, MATER RES SOC S P, V27, P401

[3]

COCHRAN JK, 1984, DEFECT PROPERTIES PR

[4]

Crowder Billy L., 1973, ION IMPLANTATION SEM

[5]

Farlow G.C., 1984, MATER RES SOC S P, V27, P395

[6] THERMAL ANNEALING OF FE IMPLANTED AL2O3 IN AN OXIDIZING AND REDUCING ENVIRONMENT [J].

FARLOW, GC ;

WHITE, CW ;

MCHARGUE, CJ ;

SKLAD, PS ;

APPLETON, BR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :541-546

[7] DEPTH PROFILES OF LATTICE DISORDER RESULTING FORM ION BOMBARDMENT OF SILICON SINGLE CRYSTALS [J].

FELDMAN, LC ;

RODGERS, JW .

JOURNAL OF APPLIED PHYSICS, 1970, 41 (09) :3776-&

[8] MECHANICAL PROPERTY CHANGES IN SAPPHIRE BY NICKEL ION-IMPLANTATION AND THEIR DEPENDENCE ON IMPLANTATION TEMPERATURE [J].

HIOKI, T ;

ITOH, A ;

OHKUBO, M ;

NODA, S ;

DOI, H ;

KAWAMOTO, J ;

KAMIGAITO, O .

JOURNAL OF MATERIALS SCIENCE, 1986, 21 (04) :1321-1328

[9] EFFECT OF ION-IMPLANTATION ON FRACTURE-STRESS OF AL2O3 [J].

HIOKI, T ;

ITOH, A ;

NODA, S ;

DOI, H ;

KAWAMOTO, J ;

KAMIGAITO, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :521-525

[10] STRENGTHENING OF AL2O3 BY ION-IMPLANTATION [J].

HIOKI, T ;

ITOH, A ;

NODA, S ;

DOI, H ;

KAWAMOTO, J ;

KAMIGAITO, O .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1984, 3 (12) :1099-1101

← 1 2 3 →