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2-DIMENSIONAL MULTIWAVELENGTH SURFACE-EMITTING LASER ARRAYS FABRICATED BY NONPLANAR MOCVD

被引：31
作者：
KOYAMA, F
MUKAIHARA, T
HAYASHI, Y
OHNOKI, N
HATORI, N
IGA, K
机构：
[1] P&I Lab., Tokyo Institute of Technology, Midori-ku, Yokohama 227
来源：
ELECTRONICS LETTERS | 1994年 / 30卷 / 23期
关键词：
CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR LASER ARRAYS; VERTICAL CAVITY SURFACE EMITTING LASERS;
D O I：
10.1049/el:19941305
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The authors demonstrate two dimensional multiwavelength vertical cavity surface emitting laser (VCSEL) arrays fabricated by using nonplanar metal organic chemical vapour deposition (MOCVD). The resonance wavelength of GaInAs/GaAs VCSELs grown on a patterned substrate is successfully controlled in the wavelength range over 45nm on wafer. The threshold of multiwavelength VCSELs formed on the patterned substrate is as low as 3mA.
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页码：1947 / 1948
页数：2
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