STUDY OF THE PHOSPHINE PLASMA DECOMPOSITION AND ITS FORMATION BY ABLATION OF RED PHOSPHORUS IN HYDROGEN PLASMA

被引：28

作者：

BRUNO, G

LOSURDO, M

CAPEZZUTO, P

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1995年 / 13卷 / 02期

关键词：

D O I：

10.1116/1.579364

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：349 / 358

页数：10

共 28 条

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