DEPOSITION OF THIN HIGHLY DISPERSIVE DIAMOND FILMS BY LASER-ABLATION

被引:19
作者
GUSEVA, MB
BABAEV, VG
KHVOSTOV, VV
VALIOULLOVA, ZK
BREGADZE, AY
OBRAZTSOV, AN
ALEXENKO, AE
机构
[1] MOSCOW MV LOMONOSOV STATE UNIV,INST NUCL PHYS,MOSCOW 119899,RUSSIA
[2] INST PHYS CHEM,MOSCOW 117915,RUSSIA
关键词
D O I
10.1016/0925-9635(94)90180-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new method for diamond film preparation by laser ablation of a highly dispersive diamond target is proposed. Transmission and scanning electron microscopy, Raman and Auger spectroscopy data prove that the deposited film consists of cubic diamond. The density of diamond crystallites is 10(11)-10(12) cm-2 . They were used as nucleation centres for subsequent CVD growth of thick diamond film.
引用
收藏
页码:328 / 331
页数:4
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