ADVANCED CONTROL DESIGN CONSIDERATIONS FOR THE CZOCHRALSKI PROCESS

被引：22

作者：

GEVELBER, MA

WARGO, MJ

STEPHANOPOULOS, G

机构：

[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139

[2] MIT,DEPT CHEM ENGN,CAMBRIDGE,MA 02139

来源：

JOURNAL OF CRYSTAL GROWTH | 1987年 / 85卷 / 1-2期

关键词：

D O I：

10.1016/0022-0248(87)90232-6

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：256 / 263

页数：8

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