ION-BOMBARDMENT OF POLYIMIDE FILMS

被引:126
作者
BACHMAN, BJ
VASILE, MJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.575779
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2709 / 2716
页数:8
相关论文
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